Semiconductor Science Research Support Team

Supporting nano-device fabrication

To build a sustainable society, it is essential to realize devices with low power consumption and high-speed operation based on nanotechnologies. In Center for Emergent Matter Science, researchers are developing quantum and spin devices by using state-of-the-art equipment with its best condition Our team is established to support the researcher’s activity by providing skillful expertise. We are responsible for the operation of equipment like lithography systems including electron-beam lithography systems, maskless UV photolithography systems, deposition systems like evaporators and sputters, dry and wet etching systems and observation system like scanning electron microscopy. We instruct users in the usage of equipment and provide technical information in fabrication. With our effort, the researchers are now able to fabricate and characterize various devices in the range of 10 nm – 10 µm routinely.

Devices fabricated in the cleanroom.